Antiquary permit number No.451310004123 Kanagawa prefecture Public Safety Commission

Used reproducing equipment

KLA-Tencor maintenance services

In the center of the 2000 production of the front and rear equipment we do maintenance services. Please help us to reduce costs of your company by all means.

equipment name PM Refurbishment Relocation Trouble shoot Parts supply
KLA2132,2135
KLA2138,2139
KLA2350,2351,2360,2365,2367
AIT series 1, 2, 3, XP, UV
5200XP,Archer series
SFS6xxx
SP1
AlphaStep(200,500、IQ)
P series(P1,2,10,11,15,16,22)
RS series(RS35,50,55,75,100)
Flexus series(2320,2908,5400,5500)
Thermawave(OP2600,TP500)
INS series(3000,3300)
INM series(100,200,300)

Maintenance service inquiry form