搬送アーム
| Parts Number | 搬送アーム |
| Parts Description | |
| Works width | KLA 21xx |
関連商品
- Optics Interface Board
-
- 710-680279-00
- KLA 21xx
- Robot PCB Board
-
- 710-677928-00
- KLA 21xx
- Y-Flex Board
-
- 710-679610-001
- KLA 21xx
- Duel Stepper Driver Board (DSD)
-
- 710-665084-001
- KLA 21xx