NSJ164 欠陥検査装置 AMAT ComPLUS3
| Number | NSJ164 欠陥検査装置 AMAT ComPLUS3 |
| Process | Metrology |
| Name | Defect Inspection |
| Manufacturer | AMAT |
| Model | ComPLUS3 |
| Year | |
| Specification | |
| Remarks | S/N: T217R |
中古再生装置
| Number | NSJ164 欠陥検査装置 AMAT ComPLUS3 |
| Process | Metrology |
| Name | Defect Inspection |
| Manufacturer | AMAT |
| Model | ComPLUS3 |
| Year | |
| Specification | |
| Remarks | S/N: T217R |