FS0006
現在クリーンルーム内で停止中。
槽構成： HF ONB2 SC-2 ONB1 LPD
| Number | FS0006 |
| Process | WET |
| Name | Cleaner |
| Manufacturer | DNS |
| Model | FC-821L |
| Year | 2003 |
| Specification | 200mm |
| Remarks |
中古再生装置
現在クリーンルーム内で停止中。
槽構成： HF ONB2 SC-2 ONB1 LPD
| Number | FS0006 |
| Process | WET |
| Name | Cleaner |
| Manufacturer | DNS |
| Model | FC-821L |
| Year | 2003 |
| Specification | 200mm |
| Remarks |