NSF0002
| Number | NSF0002 |
| Process | Metrology |
| Name | Defect Inspection |
| Manufacturer | KLA-Tencor |
| Model | Surfscan7600 |
| Year | 1995 |
| Specification | S/N 0795－537 For 6. 8inch |
| Remarks |
| Number | NSF0002 |
| Process | Metrology |
| Name | Defect Inspection |
| Manufacturer | KLA-Tencor |
| Model | Surfscan7600 |
| Year | 1995 |
| Specification | S/N 0795－537 For 6. 8inch |
| Remarks |